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Ren, Yixin; Hubbard, Amber M; Austin, Drake; Dai, Jinghang; Li, Chen; Hu, Renjiu; Papaioannou, Peter; Picu, Catalin R; Konkolewicz, Dominik; Sarvestani, Alireza; et al (, ACS Applied Nano Materials)
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High thermal conductivity and ultrahigh thermal boundary conductance of homoepitaxial AlN thin filmsAlvarez-Escalante, Gustavo; Page, Ryan; Hu, Renjiu; Xing, Huili_Grace; Jena, Debdeep; Tian, Zhiting (, APL Materials)Wurtzite aluminum nitride (AlN) has attracted increasing attention for high-power and high-temperature operations due to its high piezoelectricity, ultrawide-bandgap, and large thermal conductivity k. The k of epitaxially grown AlN on foreign substrates has been investigated; however, no thermal studies have been conducted on homoepitaxially grown AlN. In this study, the thickness dependent k and thermal boundary conductance G of homoepitaxial AlN thin films were systematically studied using the optical pump–probe method of frequency-domain thermoreflectance. Our results show that k increases with the thickness and k values are among the highest reported for film thicknesses of 200 nm, 500 nm, and 1 μm, with values of 71.95, 152.04, and 195.71 W/(mK), respectively. Our first-principles calculations show good agreement with our measured data. Remarkably, the G between the epilayer and the substrate reported high values of 328, 477, 1180, and 2590 MW/(m2K) for sample thicknesses of 200 nm, 500 nm, 1 μm, and 3 μm, respectively. The high k and ultrahigh G of homoepitaxially grown AlN are very promising for efficient heat dissipation, which helps in device design and has advanced applications in micro-electromechanical systems, ultraviolet photonics, and high-power electronics.more » « less
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Koh, Yee Rui; Shi, Jingjing; Wang, Baiwei; Hu, Renjiu; Ahmad, Habib; Kerdsongpanya, Sit; Milosevic, Erik; Doolittle, W. Alan; Gall, Daniel; Tian, Zhiting; et al (, Physical Review B)null (Ed.)
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